3D vertical nand memory device including multiple select lines and control lines having different vertical spacing

ABSTRACT

Some embodiments include apparatuses, and methods of forming and operating the apparatuses. Some of the apparatuses include a pillar including a length, a memory cell string and control lines located along a first segment of the pillar, and select lines located along a second segment of the pillar. The control lines include at least a first control line and a second control line. The first control line is adjacent the second control line. The first control line is separated from the second control line by a first distance in a direction of the length of the pillar. The select lines include at least a first select line and a second select line. The first select line is separated from the second select line by a second distance in the direction of the length of the pillar. The second distance is less than the first distance.

PRIORITY APPLICATION

This application is a continuation of U.S. application Ser. No.17/169,029, filed Feb. 5, 2021, which is a continuation of U.S.application Ser. No. 16/668,959, filed Oct. 30, 2019, which is acontinuation of U.S. application Ser. No. 16/031,831, filed Jul. 10,2018, now issued as U.S. Pat. No. 10,468,423, which is a divisional ofU.S. application Ser. No. 15/278,405, filed Sep. 28, 2016, now issued asU.S. Pat. No. 10,042,755, all of which are incorporated herein byreference in their entirety.

BACKGROUND

Memory devices are widely used in computers and many other electronicitems to store information. A memory device usually has numerous memorycells. The memory device performs a write operation to store informationin the memory cells, a read operation to read the stored information,and an erase operation to erase information (e.g., obsolete information)from some or all of the memory cells. Memory devices also have othercomponents (e.g., control lines and select lines) to access the memorycells during read, write, and erase operations. The structures of suchcomponents can affect the performance of the memory device. As describedin more details below, the described memory devices include structuresthat allow them to have improvements over some conventional memorydevices.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a block diagram of an apparatus in the form of a memorydevice, according to some embodiments described herein.

FIG. 2 shows a block diagram of a portion of a memory device including amemory array having memory cell strings and associated select circuits,according to some embodiments described herein.

FIG. 3 shows a schematic diagram of the memory device of FIG. 2 ,according to some embodiments described herein.

FIG. 4 shows a schematic diagram of a portion of the memory device ofFIG. 3 including memory cell strings and select circuits coupled betweena source and a respective data line, according to some embodimentsdescribed herein.

FIG. 5 shows a schematic diagram of the portion of the memory device ofFIG. 4 where drain select lines are coupled to each other and sourceselect lines are coupled to each other, according to some embodimentsdescribed herein.

FIG. 6 shows a side view of a structure of a portion of the memorydevice of FIG. 4 , according to some embodiments described herein.

FIG. 7A shows a block diagram of a portion of a memory device, which canbe a variation of the memory device of FIG. 5 , including an additionaldrain select line, according to some embodiments described herein.

FIG. 7B shows a side view of a structure of a portion of the memorydevice of FIG. 7A, according to some embodiments described herein.

FIG. 8A shows a block diagram of a portion of a memory device, which canbe another variation of the memory device of FIG. 5 , including anadditional source select line, according to some embodiments describedherein.

FIG. 8B shows a side view of a structure of a portion of the memorydevice of FIG. 8A, according to some embodiments described herein.

FIG. 9A shows a block diagram of a portion of a memory device, which canbe a further variation of the memory device of FIG. 5 , includingadditional drain and source select lines, according to some embodimentsdescribed herein.

FIG. 9B shows a side view of a structure of a portion of the memorydevice of FIG. 9A, according to some embodiments described herein.

FIG. 10 shows a top view of a structure of a portion of a memory device,according to some embodiments described herein.

FIG. 11 shows a top view of a structure of a portion of another memorydevice, according to some embodiments described herein.

FIG. 12 shows a top view of a structure of a portion of another memorydevice, according to some embodiments described herein.

FIG. 13 through FIG. 15 show processes of forming a memory device,according to some embodiments described herein.

DETAILED DESCRIPTION

FIG. 1 shows a block diagram of an apparatus in the form of a memorydevice 100, according to some embodiments described herein. Memorydevice 100 can include a memory array (or multiple memory arrays) 101containing memory cells 102 arranged in blocks (blocks of memory cells),such as blocks 190 and 191. Each of blocks 190 and 191 can includesub-blocks. For example, block 190 can include sub-blocks 190 ₁ and 190₂. Block 191 can include sub-blocks 191 ₁ and 191 ₂. In the physicalstructure of memory device 100, memory cells 102 can be arrangedvertically (e.g., stacked over each other) over a substrate (e.g., asemiconductor substrate) of memory device 100. FIG. 1 shows memorydevice 100 having two blocks 190 and 191 and two sub-blocks in each ofthe blocks as an example. Memory device 100 can have more than twoblocks and more than two sub-blocks in each of the blocks.

As shown in FIG. 1 , memory device 100 can include access lines (whichcan include word lines) 150 and data lines (which can include bit lines)170. Access lines 150 can carry signals (e.g., word line signals) WL0through WLm. Data lines 170 can carry signals (e.g., bit line signals)BL0 through BLn. Memory device 100 can use access lines 150 toselectively access memory cells 102 of blocks 190 and 191 and data lines170 to selectively exchange information (e.g., data) with memory cells102 of blocks 190 and 191.

Memory device 100 can include an address register 107 to receive addressinformation (e.g., address signals) ADDR on lines (e.g., address lines)103. Memory device 100 can include row access circuitry 108 and columnaccess circuitry 109 that can decode address information from addressregister 107. Based on decoded address information, memory device 100can determine which memory cells 102 of which sub-blocks of blocks 190and 191 are to be accessed during a memory operation. Memory device 100can perform a read operation to read (e.g., sense) information (e.g.,previously stored information) in memory cells 102 of blocks 190 and191, or a write (e.g., programming) operation to store (e.g., program)information in memory cells 102 of blocks 190 and 191. Memory device 100can use data lines 170 associated with signals BL0 through BLn toprovide information to be stored in memory cells 102 or obtaininformation read (e.g., sensed) from memory cells 102. Memory device 100can also perform an erase operation to erase information from some orall of memory cells 102 of blocks 190 and 191.

Memory device 100 can include a control unit 118 that can be configuredto control memory operations of memory device 100 based on controlsignals on lines 104. Examples of the control signals on lines 104include one or more clock signals and other signals (e.g., a chip enablesignal CE#, a write enable signal WE#) to indicate which operation(e.g., read, write, or erase operation) memory device 100 can perform.

Memory device 100 can include sense and buffer circuitry 120 that caninclude components such as sense amplifiers and page buffer circuits(e.g., data latches). Sense and buffer circuitry 120 can respond tosignals BL_SEL0 through BL_SELn from column access circuitry 109. Senseand buffer circuitry 120 can be configured to determine (e.g., bysensing) the value of information read from memory cells 102 (e.g.,during a read operation) of blocks 190 and 191 and provide the value ofthe information to lines (e.g., global data lines) 175. Sense and buffercircuitry 120 can also can be configured to use signals on lines 175 todetermine the value of information to be stored (e.g., programmed) inmemory cells 102 of blocks 190 and 191 (e.g., during a write operation)based on the values (e.g., voltage values) of signals on lines 175(e.g., during a write operation).

Memory device 100 can include input/output (I/O) circuitry 117 toexchange information between memory cells 102 of blocks 190 and 191 andlines (e.g., I/O lines) 105. Signals DQ0 through DQN on lines 105 canrepresent information read from or stored in memory cells 102 of blocks190 and 191. Lines 105 can include nodes within memory device 100 orpins (or solder balls) on a package where memory device 100 can reside.Other devices external to memory device 100 (e.g., a memory controlleror a processor) can communicate with memory device 100 through lines103, 104, and 105.

Memory device 100 can receive a supply voltage, including supplyvoltages Vcc and Vss. Supply voltage Vss can operate at a groundpotential (e.g., having a value of approximately zero volts). Supplyvoltage Vcc can include an external voltage supplied to memory device100 from an external power source such as a battery or alternatingcurrent to direct current (AC-DC) converter circuitry.

Each of memory cells 102 can be programmed to store informationrepresenting a value of a fraction of a bit, a value of a single bit, ora value of multiple bits such as two, three, four, or another number ofbits. For example, each of memory cells 102 can be programmed to storeinformation representing a binary value “0” or “1” of a single bit. Thesingle bit per cell is sometimes called a single-level cell. In anotherexample, each of memory cells 102 can be programmed to store informationrepresenting a value for multiple bits, such as one of four possiblevalues “00”, “01”, “10”, and “11” of two bits, one of eight possiblevalues “000”, “001”, “010”, “011”, “100”, “101”, “110”, and “111” ofthree bits, or one of other values of another number of multiple bits. Acell that has the ability to store multiple bits is sometimes called amulti-level cell (or multi-state cell).

Memory device 100 can include a non-volatile memory device, and memorycells 102 can include non-volatile memory cells, such that memory cells102 can retain information stored thereon when power (e.g., voltage Vcc,Vss, or both) is disconnected from memory device 100. For example,memory device 100 can be a flash memory device, such as a NAND flash(e.g., 3-dimensional (3-D) NAND) or a NOR flash memory device, oranother kind of memory device, such as a variable resistance memorydevice (e.g., a phase change memory device or a resistive RAM (RandomAccess Memory) device).

One of ordinary skill in the art may recognize that memory device 100may include other components, several of which are not shown in FIG. 1so as not to obscure the example embodiments described herein. At leasta portion of memory device 100 can include structures and performoperations similar to or identical to the structures and operations ofany of the memory devices described below with reference to FIG. 2through FIG. 15 .

FIG. 2 shows a block diagram of a portion of a memory device 200including a memory array 201 having memory cell strings and associatedselect circuits, according to some embodiments described herein. Memorydevice 200 can correspond to memory device 100 of FIG. 1 . For example,memory array 201 can form part of memory array 101 of FIG. 1 .

As shown in FIG. 2 , memory device 200 can include blocks (blocks ofmemory cells) 290 and 291. Two blocks are shown as an example. Memorydevice 200 can include many blocks (e.g., up to thousands or moreblocks). Each of blocks 290 and 291 can include sub-blocks. For example,block 290 can include sub-blocks 290 ₁ and 290 ₂. Block 291 can includea sub-block 291 ₁ (and one or more additional sub-block, which are notshown). Block 290 and 291 can include the same number of sub-blocks.

Each of sub-blocks 290 ₁, 290 ₂, and 291 ₁ has its own memory cellstrings, and each of the memory cell strings can be associated with(e.g., coupled to) select circuits. For example, sub-block 290 ₁ hasmemory cell strings 231 a, 232 a, 233 a, 234 a, 235 a, and 236 a, andassociated select circuits (e.g., drain select circuits) 241 a, 242 a,243 a, 244 a, 245 a, and 246 a, and select circuits (e.g., source selectcircuits) 241′a, 242′a, 243′a, 244′a, 245′a, and 246′a.

Sub-block 290 ₂ has memory cell strings 231 b, 232 b, 233 b, 234 b, 235b, and 236 b, and associated select circuits (e.g., drain selectcircuits) 241 b, 242 b, 243 b, 244 b, 245 b, and 246 b, and selectcircuits (e.g., source select circuits) 241′ b, 242′ b, 243′ b, 244′ b,245′ b, and 246′ b.

Sub-block 291 ₁ has memory cell strings 231 c, 232 c, and 233 c, andassociated select circuits (e.g., drain select circuits) 241 c, 242 c,and 243 c, and select circuits (e.g., source select circuits) 241′c,242′c, and 243′c. The sub-blocks of the blocks (e.g., blocks 290 and291) of memory device 200 can have the same number of memory cellstrings and associated select circuits.

FIG. 2 shows an example of six memory cell strings and their associatedcircuits in a sub-block (e.g., in sub-block 290 ₁). The number of memorycell strings and their associated select circuits in each the sub-blockof blocks 290 and 291 can vary.

Memory device 200 can include data lines 270, 271, and 272 that carrysignals BL0, BL1, and BL2, respectively. Each of data lines 270, 271,and 272 can be structured as a conductive line (which includesconductive materials). The memory cell strings of blocks 290 and 291 canshare data lines 270, 271, and 272. For example, memory cell strings 231a, 234 a, 231 b, 234 b, and 231 c can share data line 270. Memory cellstrings 232 a, 235 a, 232 b, 235 b, and 232 c can share data line 271.Memory cell strings 233 a, 236 a, 233 b, 236 b, and 233 c can share dataline 272. FIG. 2 shows three data lines 270, 271, and 272 as an example.The number of data lines can vary.

Memory device 200 can include a line 299 that can carry a signal SRC(e.g., source line signal). Line 299 can be structured as a conductiveline (which includes conductive materials) and can form part of a source(e.g., a source line) of memory device 200. Blocks 290 and 291 can shareline 299.

Memory device 200 can include separate control lines in blocks 290 and291. For example, in block 290, memory device 200 includes control lines220 ₀, 221 ₀, 222 ₀, and 223 ₀ that can carry corresponding signals(e.g., word line signals) WL0 ₀, WL1 ₀, WL2 ₀, and WL3 ₀. In block 291,memory device 200 includes control lines 220 ₁, 221 ₁, 222 ₁, and 223 ₁that can carry corresponding signals (e.g., word line signals) WL0 ₁,WL1 ₁, WL2 ₁, and WL3 ₁. Control lines 220 ₀ through 223 ₀ and 220 ₁through 223 ₁ can be structured as conductive control lines (whichinclude conductive materials) that can form part of respective accesslines of memory device 200 to access memory cells in a respective block.FIG. 2 shows four control lines (220 ₀ through 223 ₀ or 220 ₁ through223 ₁) in each of blocks 290 and 291 as an example. The number ofcontrol lines can vary.

As shown in sub-block 290 ₁, memory device 200 includes select lines(e.g., drain select lines) 282 _(A0), 284 _(A0), and 286 _(A0) that canbe shared by select circuits 241 a, 242 a, and 243 a; select lines(e.g., drain select lines) 282 _(A1), 284 _(A1), and 286 _(A1) that canbe shared by select circuits 244 a, 245 a, and 246 a; select lines(e.g., source select lines) 281 _(A0), 283 _(A0), and 285 _(A0) that canbe shared by select circuits 241′a, 242′a, and 243′a; and select lines(e.g., source select lines) 281 _(A1), 283 _(A1), and 285 _(A1) that canbe shared by select circuits 244′a, 245′a, and 246′a.

In sub-block 290 ₂, memory device 200 includes select lines (e.g., drainselect lines) 282 _(B0), 284 _(B0), and 286 _(B0) that can be shared byselect circuits 241 b, 242 b, and 243 b; select lines (e.g., drainselect lines) 282 _(B1), 284 _(B1), and 286 _(B1) that can be shared byselect circuits 244 b, 245 b, and 246 b; select lines (e.g., sourceselect lines) 281 _(B0), 283 _(B0), and 285 _(B0) that can be shared byselect circuits 241′b, 242′b, and 243′b; and select lines (e.g., sourceselect lines) 281 _(B1), 283 _(B1), and 285 _(B1) that can be shared byselect circuits 244′b, 245′b, and 246′b.

In sub-block 291 ₁, memory device 200 includes select lines (e.g., drainselect lines) 282 _(C0), 284 _(C0), and 286 _(C0) that can be shared byselect circuits 241 c, 242 c, and 243 c; and select lines (e.g., sourceselect lines) 281 _(C0), 283 _(C0), and 285 _(C0) that can be shared byselect circuits 241′c, 242′c, and 243′c.

FIG. 2 shows an example where memory device 200 includes three drainselect lines (e.g., 282 _(A0), 284 _(A0), and 286 _(A0)) associated witha drain select circuit (e.g., 241 a, 242 a, or 243 a). However, memorydevice 200 can include fewer or more than three drain select linesassociated with a drain select circuit. Similarly, FIG. 2 shows anexample where memory device 200 includes three source select lines(e.g., 281 _(A0), 283 _(A0), and 285 _(A0)) associated with a sourceselect circuit (e.g., 241′a, 242′a, or 243′a). However, memory device200 can include fewer or more than three source select lines associatedwith a source select circuit.

FIG. 2 shows connections 281″_(A), 283″_(A), and 285″_(A) to indicate anexample of memory device 200 where select lines 281 _(A0) and 281 _(A1)can be coupled to each other, select lines 283 _(A0) and 283 _(A1) canbe coupled to each other, and select lines 285 _(A0) and 285 _(A1) canbe coupled to each other. Thus, in an example of memory device 200,select lines 281 _(A0) and 281 _(A1) can be provided with the samesignal; select lines 283 _(A0) and 283 _(A1) can be provided with thesame signal; and select lines 285 _(A0) and 285 _(A1) can be providedwith the same signal.

Similarly, connections 281″_(B), 283″_(B), and 285″_(B) in FIG. 2indicate an example of memory device 200 where select lines 281 _(B0)and 281 _(B1) can be coupled to each other, select lines 283 _(B0) and283 _(B1) can be coupled to each other, and select lines 285 _(B0) and285 _(B1) can be coupled to each other. Thus, in an example of memorydevice 200, select lines 281 _(B0) and 281 _(B1) can be provided withthe same signal; select lines 283 _(B0) and 283 _(B1) can be providedwith the same signal; and select lines 285 _(B0) and 285 _(B1) can beprovided with the same signal.

In the structure of memory device 200, each of connections 281″_(A),283″_(A), and 285″_(A) can be a direct connection. As an example, in adirect connection, select lines 281 _(A0) and 281 _(A1) can be part ofthe same piece of conductive material (e.g., a same layer of conductivematerial); select lines 283 _(A0) and 283 _(A1) can be part of the samepiece of conductive material (e.g., a same layer of conductivematerial); and select lines 285 _(A0) and 285 _(A1) can be part of thesame piece of conductive material (e.g., a same layer of conductivematerial). Alternatively, each of connections 281″_(A), 283″_(A), and285″_(A) can be an indirect connection. For example, in the indirectconnection, select lines 281 _(A0) and 281 _(A1) may not be formed fromthe same piece (e.g., layer) of conductive material but they can becoupled (e.g., electrically coupled) to each other through a transistor(or through multiple transistors); select lines 283 _(A0) and 283 _(A1)may not be formed from the same piece (e.g., layer) of conductivematerial but they can be coupled (e.g., electrically couple) to eachother through a transistor (or through multiple transistors); and selectlines 285 _(A0) and 285 _(A1) may not be formed from the same piece(e.g., layer) of conductive material but they can be coupled (e.g.,electrically coupled) to each other through a transistor (or throughmultiple transistors).

Similarly, in the structure of memory device 200, each of connections281″_(B), 283″_(B), and 285″_(B) can be a direct connection. As anexample, in a direct connection, select lines 281 _(B0) and 281 _(B1)can be part of the same piece of conductive material (e.g., a same layerof conductive material); select lines 283 _(B0) and 283 _(B1) can bepart of the same piece of conductive material (e.g., a same layer ofconductive material); and select lines 285 _(B0) and 285 _(B1) can bepart of the same piece of conductive material (e.g., a same layer ofconductive material). Alternatively, each of connections 281″_(B),283″_(B), and 285″_(B) can be an indirect connection. For example, inthe indirect connection, select lines 281 _(B0) and 281 _(B1) may not beformed from the same piece (e.g., layer) of conductive material but theycan be coupled (e.g., electrically coupled) to each other through atransistor (or through multiple transistors); select lines 283 _(B0) and283 _(B1) may not be formed from the same piece (e.g., layer) ofconductive material but they can be coupled (e.g., electrically coupled)to each other through a transistor (or through multiple transistors);and select lines 285 _(B0) and 285 _(B1) may not be formed from the samepiece (e.g., layer) of conductive material but they can be coupled(e.g., electrically coupled) to each other through a transistor (orthrough multiple transistors).

FIG. 2 shows an example where select lines 282 _(A0), 284 _(A0), and 286_(A0) are uncoupled from (i.e., independent of) each other; select lines282 _(A1), 284 _(A1), and 286 _(A1) are uncoupled from each other;select lines 282 _(B0), 284 _(B0), and 286 _(B0) are uncoupled from eachother; select lines 282 _(B1), 284 _(B1), and 286 _(B1) are uncoupledfrom each other; and select lines 282 _(C0), 284 _(C0), and 286 _(C0)are uncoupled from each other. Alternatively, select lines 282 _(A0),284 _(A0), and 286 _(A0) can be coupled (e.g., directly coupled) to eachother; select lines 282 _(A1), 284 _(A1), and 286 _(A1) can be coupled(e.g., directly coupled) to each other; select lines 282 _(B0), 284_(B0), and 286 _(B0) can be coupled (e.g., directly coupled) to eachother; select lines 282 _(B1), 284 _(B1), and 286 _(B1) can be coupled(e.g., directly coupled) to each other; and select lines 282 _(C0), 284_(C0), and 286 _(C0) can be coupled (e.g., directly coupled) to eachother.

Each of the select circuits of memory device 200 can include multipleselect gates (e.g., three transistors, shown in FIG. 3 ). The selectgates can be controlled (e.g., turned on or turned off) by the levels(e.g., voltage levels) of the signals on respective select lines.

In FIG. 2 , each of the memory cell strings of memory device 200 hasmemory cells (shown in FIG. 3 ) arranged in a string (e.g., coupled inseries among each other) to store information. During an operation(e.g., read, write, or erase operation) of memory device 200, the memorycell strings can be individually selected to access the memory cells inthe selected memory cell string in order to store information in or readinformation from the selected memory cell string. One or both selectcircuits (a drain select circuit and a source select circuit) associatedwith a selected memory cell string can be activated (e.g., by turning onthe transistors in the select circuit (or selected circuits)), dependingon which operation memory device 200 performs on the selected memorycell string.

Activating a particular select circuit among the select circuits ofmemory device 200 during an operation of memory device 200 can includeproviding (e.g., applying) voltages having certain values to the signalson select lines associated with that particular select circuit. When aparticular drain select circuit of memory device 200 is activated, itcan couple (e.g., form a current path from) a selected memory cellstring associated with that particular select circuit to a respectivedata line (e.g., one of data lines 270, 271, or 272). When a particularsource select circuit is activated, it can couple (e.g., form a currentpath from) a selected memory cell string associated with that particularselect circuit to a source (e.g., line 299).

FIG. 3 shows a schematic diagram of memory device 200 of FIG. 2 ,according to some embodiments described herein. For simplicity, onlysome of the memory cell strings and some of the select circuits ofmemory device 200 of FIG. 2 are labeled in FIG. 3 .

As shown in FIG. 3 , each select line can carry an associated selectsignal. For example, in sub-block 290 ₁, select lines (e.g., drainselect lines) 282 _(A0), 284 _(A0), 286 _(A0), 282 _(A1), 284 _(A1), and286 _(A1) can carry associated signals SGD3 _(A0), SGD2 _(A0), SGD1_(A0), SGD3 _(A1), SGD2 _(A1), and SGD1 _(A1), respectively; selectlines (e.g., source select lines) 281 _(A0), 283 _(A0), 285 _(A0), 281_(A1), 283 _(A1), and 285 _(A1) can carry associated signals SGS3 _(A0),SGS2 _(A0), SGS1 _(A0), SGS3 _(A1), SGS2 _(A1), and SGS1 _(A1),respectively. In sub-block 290 ₂, select lines (e.g., drain selectlines) 282 _(B0), 284 _(B0), 286 _(B0), 282 _(B1), 284 _(B1), and 286_(B1) can carry associated signals SGD3 _(B0), SGD2 _(B0), SGD1 _(B0),SGD3 _(B1), SGD2 _(B1), and SGD1 _(B1), respectively; select lines(e.g., source select lines) 281 _(B0), 283 _(B0), 285 _(B0), 281 _(B1),283 _(B1), and 285 _(B1) can carry associated signals SGS3 _(B0), SGS2_(B0), SGS1 _(B0), SGS3 _(B1), SGS2 _(B1), and SGS1 _(B1), respectively.In sub-block 291 ₁, select lines (e.g., drain select lines) 282 _(C0),284 _(C0), and 286 _(C0) can carry associated signals SGD3 _(C0), SGD2_(C0), and SGD1 _(C0), respectively; select lines (e.g., source selectlines) 281 _(C0), 283 _(C0), and 285 _(C0) can carry associated signalsSGS3 _(C0), SGS2 _(C0), and SGS1 _(C0), respectively.

As shown in FIG. 3 , memory device 200 can include memory cells 210,211, 212, and 213; select gates (e.g., drain select gates ortransistors) 262, 264, 266; and select gates (e.g., source select gatesor transistors) 261, 263, and 265 that can be physically arranged inthree dimensions (3-D), such as x, y, and z dimensions (e.g.,directions), with respect to the structure (shown in FIG. 6 ) of memorydevice 200.

Each of the memory cell strings (e.g., memory cell strings 231 a, 232 a,233 a, 234 a, 231 b, 234 b, 231 c) of memory device 200 can include oneof memory cells 210, one of memory cells 211, one of memory cells 212,and one of memory cells 213. FIG. 3 shows an example of four memorycells 210, 211, 212, and 213 in each memory cell string. The number ofmemory cells in each memory cell string can vary. Moreover, one skilledin the art would recognize that some of the memory cells among memorycells 210, 211, 212, and 213 of the memory cell strings of memory device200 may be dummy memory cells. Dummy memory cells are memory cells thatare not configured to store information. Dummy memory cells may beconfigured for purposes known to those skilled in the art. In someexamples of memory device 200, one or two (or more) of memory cells atthe two ends of each the memory cell strings of memory device 200 (e.g.,memory cells immediately next to select gates 265, select gates 266, orboth select gates 265 and 266) may be dummy memory cells.

In FIG. 3 , each of the select circuits can include three select gates.For example, each of select circuits 241 a, 242 a, 243 a, 244 a, 241 b,244 b, and 241 c can include three select gates: one of select gates262, one of select gates 264, and one of select gates 266. Each ofselect circuits 241′a, 242′a, 243′a, 244′a, 241′b, 244′b, and 241′c caninclude three select gates: one of select gates 261, one of select gates263, and one of select gates 265.

Each of select gates 261 through 266 can operate as a transistor. Aselect line shared among particular select circuits can be shared byselect gates of those particular select circuits. For example, selectline 282 _(A0) can be shared by select gates 262 of select circuit 241a, 242 a, and 243 a; select line 284 _(A0) can be shared by select gates264 of select circuit 241 a, 242 a, and 243 a; and select line 286 _(A0)can be shared by select gates 266 of select circuit 241 a, 242 a, and243 a. In another example, select line 281 _(A0) can be shared by selectgates 261 of select circuit 241′a, 242′a, and 243′a; select line 283_(A0) can be shared by select gates 263 of select circuit 241′a, 242′a,and 243′a; and select line 285 _(A0) can be shared by select gates 265of select circuit 241′a, 242′a, and 243′a.

A select line (e.g., select line 282 _(A0)) can carry a signal (e.g.,signal SGD3 _(A0)) but it does not operate like a switch (e.g., atransistor). A select gate (e.g., select gate 262) can receive a signal(e.g., signal SGD3 _(A0)) from a respective select line (e.g., selectline 282 _(A0)) and can operate like a switch (e.g., a transistor).

In order to focus on the embodiments discussed herein, the descriptionbelow with reference to FIG. 4 through FIG. 9B focuses on sub-block 290₁ including three memory cell strings 231 a, 232 a, and 233 a, selectcircuits (e.g., drain select circuits) 241 a, 242 a, and 243 a, andselect circuits (e.g., source select circuit) 241′a, 242′a, and 243′a.Other memory cell strings and select circuits of memory device 200 havesimilar structures and connections.

FIG. 4 shows a schematic diagram of a portion of memory device 200 ofFIG. 3 including memory cell strings 231 a, 232 a, and 233 a, and selectcircuits 241 a, 242 a, 243 a, 241′a, 242′a, and 243′a coupled betweenline 299 and a respective data line among data lines 270, 271, and 272,according to some embodiments described herein. As shown in FIG. 4 ,select gates 262, 264, and 266 of each of select circuits 241 a, 242 a,and 243 a can be coupled in series between a respective data line amongdata lines 270, 271, and 272 and a respective memory cell string amongmemory cell strings 231 a, 232 a, and 233 a. Select gates 261, 263, and265 of each of select circuits 241′a, 242′a, and 243′a can be coupledbetween line 299 and a respective memory cell string among memory cellstrings 231 a, 232 a, and 233 a.

Select gate 262 of each of select circuits 241 a, 242 a, and 243 a has aterminal (e.g., a transistor gate) that can be part of (e.g., formed bya portion of) select line 282 _(A0). Select gate 264 of each of selectcircuits 241 a, 242 a, and 243 a has a terminal (e.g., a transistorgate) that can be part of (e.g., formed by a portion of) select line 284_(A0). Select gate 266 of each of select circuits 241 a, 242 a, and 243a has a terminal (e.g., a transistor gate) that can be part of (e.g.,formed by a portion of) select line 286 _(A0). Select gates 262, 264,and 266 can be controlled (e.g., turned on or turned off) by signalsSGD3 _(A0), SGD2 _(A0), and SGD1 _(A0), respectively.

Select gate 261 of each of select circuits 241′a, 242′a, and 243′a has aterminal (e.g., a transistor gate) that can be part of (e.g., formed bya portion of) select line 281 _(A0). Select gate 263 of each of selectcircuits 241′a, 242′a, and 243′a has a terminal (e.g., a transistorgate) that can be part of (e.g., formed by a portion of) select line 283_(A0). Select gate 265 of each of select circuits 241′a, 242′a, and243′a has a terminal (e.g., a transistor gate) that can be part of(e.g., formed by a portion of) select line 285 _(A0). Select gates 261,263, and 265 can be controlled (e.g., turned on or turned off) bysignals SGS3 _(A0), SGS2 _(A0), and SGS1 _(A0), respectively.

During an operation (e.g., a read or write operation) of memory device200, signals SGD1 _(A0), SGD2 _(A0), and SGD3 _(A0) can be provided withvoltages to either activate (e.g., concurrently turn on) or deactivate(e.g., concurrently turn off) select gates 262, 264, and 266 of each ofselect circuits 241 a, 242 a, and 243 a, depending on whether or notmemory cell strings 231 a, 232 a, and 233 a are selected to be accessed.Similarly, during an operation (e.g., read or write operation) of memorydevice 200, signals SGS1 _(A0), SGS2 _(A0), and SGS3 _(A0) can beprovided with voltages to either activate (e.g., concurrently turn on)or deactivate (e.g., concurrently turn off) select gates 261, 263, and265 of each of select circuits 241′a, 242′a, and 243′a, depending onwhether or not memory cell strings 231 a, 232 a, and 233 a are selectedto be accessed.

For example, in FIG. 4 , during a write operation of memory device 200,if memory cell strings 231 a, 232 a, and 233 a are selected to beaccessed to store information in them, then select gates 262, 264, and266 of select circuits 241 a, 242 a, and 243 a can be activated (e.g.,turned on) to couple (electrically couple) memory cell strings 231 a,232 a, and 233 a to data lines 270, 271, and 272, respectively; selectgates 261, 263, and 265 of select circuits 241′a, 242′a, and 243′a maybe deactivated (e.g., turned off). In another example, in FIG. 4 ,during a read operation of memory device 200, if memory cell strings 231a, 232 a, and 233 a are selected to be accessed to read information fromthem, then select gates 262, 264, and 266 of select circuits 241 a, 242a, and 243 a can be activated (e.g., turned on) to couple (electricallycouple) memory cell strings 231 a, 232 a, and 233 a to data lines 270,271, and 272, respectively. In the read operation, select gates 261,263, and 265 of select circuits 241′a, 242′a, and 243′a can also beactivated (e.g., turned on) to couple (electrically couple) memory cellstrings 231 a, 232 a, and 233 a to line 299.

During the erase operation, signals SGD3 _(A0), SGD2 _(A0), SGD1 _(A0),SGS3 _(A0), SGS2 _(A0), and SGS1 _(A0) can be provided with a voltage tocause select gates 261 through 266 to be in a condition such thatgate-induced drain-leakage (GIDL) current can be generated in order tohelp the erase operation. For example, the GIDL current generated byselect gates 261 through 266 during the erase operation may speed up thecharging of the body of the memory cell strings in the selectedsub-block (e.g., memory cell strings 231 a, 232 a, and 233 a).

Thus, as described above, select gates 261 through 266 can operate asswitches (e.g., a transistor) during a read or write operation (toselect a corresponding memory cell string during the read or writeoperation) and can operate as GIDL generators to generate GIDL currentfor the erase operations.

If memory cell strings 231 a, 232 a, and 233 a are not selected(unselected) to be accessed (to store information in or read informationfrom them) in an example operation of memory device 200, then selectgates 261 through 266 can be deactivated (e.g., turned off).

FIG. 4 shows an example where select lines 282 _(A0), 284 _(A0), and 286_(A0) are uncoupled from each other and carry separate signals SGD3_(A0), SGD2 _(A0), and SGD1 _(A0), respectively. Alternatively, selectlines 282 _(A0), 284 _(A0), and 286 _(A0) can be coupled (e.g., eitherphysically or electrically coupled) to each other. Similarly, FIG. 4shows an example where select lines 281 _(A0), 283 _(A0), and 285 _(A0)are uncoupled from each other and carry separate signals SGS3 _(A0),SGS2 _(A0), and SGS1 _(A0), respectively. Alternatively, select lines281 _(A0), 283 _(A0), and 285 _(A0) can be coupled (e.g., eitherphysically or electrically coupled) to each other.

FIG. 5 shows a schematic diagram of the portion of memory device 200 ofFIG. 4 where select lines 282 _(A0), 284 _(A0), and 286 _(A0) arecoupled to each other through a connection 580, and select lines 281_(A0), 283 _(A0), and 285 _(A0) are coupled to each other through aconnection 581, according to some embodiments described herein. As shownin FIG. 5 , memory device 200 can include driver circuits 560, 561, and562. Driver circuit 560 (e.g., word line driver circuit) can includedrive transistors (not shown) that can operate to couple control lines220 ₀, 221 ₀, 222 ₀, and 223 ₀ to signal lines (not shown). The signallines can have the same voltages or different voltages, depending whichmemory cells among memory cells 210, 211, 212, and 213 of memory cellstrings 231 a, 232 a, and 233 a are selected to be accessed during anoperation (e.g., a read or write operation) of memory device 200.

Driver circuit 561 can include a drive transistor (e.g., high voltagetransistor (a transistor that may operate a voltage of 3V or higher))Tr1 that can be controlled (e.g., turned on or turned off) by a signalDR1. Drive transistor Tr1 can operate to couple connection 580 to asignal line that has a signal (voltage signal) V1. Signal V1 can beprovided with a voltage that has a value to activate (e.g., turn on) ordeactivate (e.g., turn off) select gates 262, 264, and 266 of each ofselect circuits 241 a, 242 a, and 243 a, depending on whether or notmemory cell strings 231 a, 232 a, and 233 a are selected to be accessedduring an operation (e.g., a read or write operation) of memory device200.

Driver circuit 562 can include a drive transistor (e.g., high voltagetransistor) Tr2 that can be controlled (e.g., turned on or turned off)by a signal DR2. Drive transistor Tr2 can operate to couple connection581 to a signal line that has a signal (voltage signal) V2. Signal V2can be provided with a voltage that has a value to activate (e.g., turnon) or deactivate select gates 261, 263, and 265 of each of selectcircuits 241′a, 242′a, and 243′a, depending on whether or not memorycell strings 231 a, 232 a, and 233 a are selected to be accessed duringan operation (e.g., a read or write operation) of memory device 200.

FIG. 6 shows a side view of a structure of a portion of memory device200, according to some embodiments described herein. The structure ofmemory device 200 in FIG. 6 corresponds to part of the schematic diagramof memory device 200 shown in FIG. 4 or FIG. 5 . For simplicity, labelsfor some instances of similar elements are omitted from FIG. 6 . Asshown in FIG. 6 , memory device 200 can include a substrate 690 overwhich memory cells 210, 211, 212, and 213 of memory cell strings 231 a,232 a, and 233 a of sub-block 290 ₁ can be formed (e.g., formedvertically with respect to substrate 690). Memory device 200 includesdifferent levels 607 through 616 with respect to a z-dimension. Levels607 through 616 are internal device levels between substrate 690 anddata lines 270, 271, and 272 of memory device 200. As shown in FIG. 6 ,memory cells 210, 211, 212, and 213 can be located in levels 610, 611,612, and 613, respectively. Control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀(associated with memory cells 210, 211, 212, and 213, respectively) canalso be located in levels 610, 611, 612, and 613, respectively. Selectlines 281 _(A0), 283 _(A0), and 285 _(A0) can be located in differentlevels (e.g., levels 607, 608, and 609, respectively) between substrate690 and memory cell strings 231 a, 232 a, and 233 a. Select lines 282_(A0), 284 _(A0), and 286 _(A0) can be located in different levels(e.g., levels 616, 615, and 614, respectively), such that memory cellstrings 231 a, 232 a, and 233 a are between select lines 282 _(A0), 284_(A0), and 286 _(A0) and substrate 690.

Substrate 690 of memory device 200 can include monocrystalline (alsoreferred to as single-crystal) semiconductor material. For example,substrate 690 can include monocrystalline silicon (also referred to assingle-crystal silicon). The monocrystalline semiconductor material ofsubstrate 690 can include impurities, such that substrate 690 can have aspecific conductivity type (e.g., n-type or p-type). Although not shownin FIG. 6 , substrate 690 can include circuitry that can be locateddirectly under line 299 and pillars 631, 632, and 633. Such circuitrycan include sense amplifiers, buffers (e.g., page buffers), decoders,and other circuit components of memory device 200.

Each of data lines 270, 271, and 272 has a width in the direction of they-dimension (e.g., extending from left to right in the view shown inFIG. 6 ), which is perpendicular to the z-dimension. Each of data lines270, 271, and 272 has a length extending in the direction of anx-dimension (e.g., shown in FIG. 3 ), which is perpendicular to thez-dimension and the y-dimension. Each of data lines 270, 271, and 272can include a conductive material (e.g., conductively dopedpolycrystalline silicon (doped polysilicon), metals, or other conductivematerials). Line 299 can include a conductive material and can have alength extending the direction of the y-dimension. FIG. 6 shows anexample where line 299 (e.g., source) can be formed over a portion ofsubstrate 690 (e.g., by depositing a conductive material over substrate690). Alternatively, line 299 can be formed in or formed on a portion ofsubstrate 690 (e.g., by doping a portion of substrate 690).

As shown in FIG. 6 , memory device 200 can include pillars (conductivepillars) 631, 632, and 633 having lengths extending outwardly (e.g.,vertically in the direction of the z-dimension of memory device 200)from a conductive material region of line 299. Each of pillars 631, 632,and 633 can include portions 643, 644, 645, and 646. Portion 643 of arespective pillar can be coupled (e.g., directly coupled) to arespective data line. For example, the material of portion 643 candirectly contact a conductive material region of a respective data lineamong data lines 270, 271, and 272. Portion 646 of a respective pillarcan be coupled (e.g., directly coupled) to line 299. For example, thematerial of portion 646 can directly contact a conductive materialregion of line 299. Portion 644 of a respective pillar can be betweenportions 643 and 646 of the respective pillar. Portion 645 of arespective pillar can be surrounded by portions 643, 644, and 646 of therespective pillar.

Each of portions 643, 644, and 646 can include conductive material(e.g., doped polycrystalline silicon). Portion 645 (e.g., a filler) caninclude dielectric material (e.g., an oxide of silicon, such as silicondioxide). FIG. 6 shows an example where each of pillars 631, 632, and633 includes portion 645 (e.g., dielectric material). Alternatively,portion 645 can be omitted, such that the material of portion 644 mayalso occupy the space occupied by portion 645.

Portions 643 and 646 can include materials of the same conductivitytype. Portion 644 can include a material having a different conductivitytype from that of portions 643 and 646. For example, portions 643 and646 can include a semiconductor material of n-type (e.g., n-typepolycrystalline silicon), and portion 644 can include a semiconductormaterial of p-type (e.g., p-type polycrystalline silicon).Alternatively, portions 643, 644, and 646 can include materials of thesame conductivity type (e.g., n-type polycrystalline silicon).

Portion 644 and at least part of each of portions 643 and 646 can form aconductive channel (e.g., part of the body of the memory cell string) ina respective pillar among pillars 631, 632, and 633. The conductivechannel can carry current (e.g., current between data lines 270, 271,and 272 and line 299 (e.g., source)) during an operation (e.g., read,write, or erase) of memory device 200. FIG. 6 shows an example wherepart of portion 643 can extend from a respective data line to a locationin a respective pillar at approximately the level 616. However, part ofportion 643 can extend to any location in a respective pillar betweenlevel 614 and 616.

As shown in FIG. 6 , memory cells 210, 211, 212, and 213 of memory cellstring 233 a can be located along a segment of pillar 633 (e.g., thesegment of pillar 633 extending from level 610 to level 613). In asimilar structure, memory cells 210, 211, 212, and 213 (not labeled inFIG. 6 ) of memory cell strings 231 a, and 232 a can be located along asegment of a respective pillar among pillars 631 and 632.

Control lines 220 ₀, 221 ₀, 222 ₀, 223 ₀ (associated with respectivememory cells 210, 211, 212, and 213) can be located along a segment(e.g., the segment extending from level 610 to level 613) of arespective pillar among pillars 631, 632, and 633. The materials ofcontrol lines 220 ₀, 221 ₀, 222 ₀, 223 ₀ can include a conductivematerial (e.g., conductively doped polycrystalline silicon of n-type,metals, or other conductive materials).

Select line 282 _(A0) can be located in level 616 along a segment(segment at level 616) of each of pillars 631, 632, and 633. Select line284 _(A0) can be located in level 615 along a segment (segment at level615) of each of pillars 631, 632, and 633. Select line 286 _(A0) can belocated in level 614 along a segment (segment at level 614) of each ofpillars 631, 632, and 633. The materials of select lines 282 _(A0), 284_(A0), and 286 _(A0) can include conductively doped polycrystallinesilicon, metals, or other conductive materials and can be the same asthe conductive material of control lines 220 ₀, 221 ₀, 222 ₀, 223 ₀.

Select line 281 _(A0) can be located in level 607 along a segment(segment at level 607) of each of pillars 631, 632, and 633. Select line283 _(A0) can be located in level 608 along a segment (segment at level608) of each of pillars 631, 632, and 633. Select line 285 _(A0) can belocated in level 609 along a segment (segment at level 609) of each ofpillars 631, 632, and 633. The materials of select lines 281 _(A0), 283_(A0), and 285 _(A0) can include conductively doped polycrystallinesilicon, metals, or other conductive materials and can be the same asthe material of control lines 22 ₀. 221 ₀, 222 ₀, 223 ₀.

As shown in FIG. 6 , each of memory cell strings 231 a, 232 a, and 233 acan include a structure 630, which includes portions 601, 602, and 603between a respective pillar and control lines 220 ₀, 221 ₀, 222 ₀, 223₀. For example, structure 630 in memory cell string 232 a is betweenpillar 632 and control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀. Each ofmemory cells 210, 211, 212, and 213 of memory cell string 232 a caninclude part of structure 630 (part of portions 601, 602, and 603).Structure 630 can be part of a TANOS (TaN, Al₂O₃, Si₃N₄, SiO₂, Si)structure. For example, portion 601 (e.g., interpoly dielectrics) caninclude a charge blocking material or materials (e.g., a dielectricmaterial such as TaN and Al₂O₃) that are capable of blocking a tunnelingof a charge. Portion 602 can include a charge storage element (e.g.,charge storage material or materials, such as Si₃N₄) that can provide acharge storage function (e.g., trap charge) to represent a value ofinformation stored in memory cells 210, 211, 212, or 213. Portion 603can include a tunnel dielectric material or materials (e.g., SiO₂) thatare capable of allowing tunneling of a charge (e.g., electrons). As anexample, portion 603 can allow tunneling of electrons from portion 644to portion 602 during a write operation and tunneling of electrons fromportion 602 to portion 644 during an erase operation of memory device200. Moreover, portion 603 can allow tunneling of holes from portion 644to portion 602, compensating the trapped electron recombination duringan erase operation of memory device 200. In an alternative arrangementof memory device 200, structure 630 can be part of a SONOS (Si, SiO₂,Si₃N₄, SiO₂, Si) structure. In another alternative arrangement,structure 630 can be part of a floating gate structure.

As shown in FIG. 6 , a select line (e.g., 282 _(A0), 284 _(A0), 286_(A0), 281 _(A0), 283 _(A0), or 285 _(A0)) is a piece (e.g., a singlelayer) of conductive material (e.g., polycrystalline silicon, metal, orother conductive materials). As described above, a select line can carrya signal (e.g., signal SGD1 _(A0), SGD2 _(A0), SGD3 _(A0), SGS1 _(A0),SGS2 _(A0), or SGS3 _(A0) in FIG. 3 ) but it does not operate like aswitch (e.g., a transistor). A select gate (e.g., each of select gates261 through 266) can include a portion of a respective select line(e.g., a portion of the piece of the conductive material that forms therespective select line) and additional structures to perform a function(e.g., function of a transistor). For example, in FIG. 6 , select gate262 can include a portion of select line 282 _(A0) and a portion ofstructure 630, and select gate 261 can include a portion of select line281 _(A0) and portion of structure 630.

FIG. 6 shows an example where select gates 261 through 266 have the samestructure (e.g., TANOS structure) as memory cells 210, 211, 212, and213. Alternatively, select gates 261, 263, and 265 (e.g., source selectgate), select gates 262, 264, and 268 (e.g., drain select gate), orselect gates 261 through 266 (both source select gates and drain selectgates) can have a different structure, such as a field-effect transistor(FET) structure. An example of an FET includes a metal-oxidesemiconductor (MOS) transistor structure. As is known to those skilledin the art, an FET usually includes a transistor gate, a transistor bodychannel, and a gate oxide between the transistor gate and the transistorbody channel that can be in direct contact with the transistor gate andthe transistor body channel.

As shown in FIG. 6 , two adjacent control lines (two control lineslocated immediately vertically next to each other in the direction ofthe z-dimension) among control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀ arevertically separated from each other by a distance (e.g., spacing) D1.Two adjacent select lines (e.g., two drain select lines locatedimmediately vertically next to each other in the direction of thez-dimension) among select lines 282 _(A0), 284 _(A0), and 286 _(A0) arevertically separated from each other by a distance (e.g., spacing) D2.Two adjacent select lines (e.g., two source select lines locatedimmediately vertically next to each other in the direction of thez-dimension) among select lines 281 _(A0), 283 _(A0), and 285 _(A0) arevertically separated from each other by a distance (e.g., spacing) D2′.Distances D2 and D2′ can be the same (e.g., substantially equal). Eachof distances D2 and D2′ can be less than (e.g., shorter than) distanceD1.

As shown in FIG. 6 , distance D1 is a vertical distance (e.g., verticalspacing) measured from the nearest top or bottom edge (surfaces directlyfacing each other with respect to the z-dimension) of any of twovertically adjacent control lines. As described above, each of controllines 220 ₀, 221 ₀, 222 ₀, and 223 ₀ can be formed from a conductivematerial (e.g., metal or another conductive material). Thus, distance D1can be measured between two nearest edges of the materials that form twoadjacent control lines. For example, distance D1 can be measured fromthe nearest edges of the materials that form control lines 220 ₀ and 221₀, the nearest edges of the materials that form control lines 221 ₀ and222 ₀, or the nearest edges of the materials that form control lines 222₀ and 223 ₀.

Distance D2 is a vertical distance (e.g., vertical spacing) measuredfrom the nearest top or bottom edge (surfaces directly facing each otherwith respect to the z-dimension) of any two vertically adjacent selectlines among select lines 282 _(A0), 284 _(A0), and 286 _(A0). Asdescribed above, each of the select lines among select lines 282 _(A0),284 _(A0), and 286 _(A0) can be formed from a conductive material (e.g.,metal or another conductive material). Thus, distance D2 can be measuredbetween two nearest edges of the materials that form two adjacent selectlines among select lines 282 _(A0), 284 _(A0), and 286 _(A0). Forexample, distance D2 can be measured between the nearest edges of thematerials that form select lines 282 _(A0) and 284 _(A0), or the nearestedges of the materials that form select lines 284 _(A0) and 286 _(A0).

Distance D2′ is a vertical distance (e.g., vertical spacing) measuredfrom the nearest top or bottom edge (edges with respected to thez-dimension sides directly facing each other with respect to thez-dimension) of any of two vertically adjacent select lines among selectlines 281 _(A0), 283 _(A0), and 285 _(A0). As described above, each ofthe select lines among select lines 281 _(A0), 283 _(A0), and 285 _(A0)can be formed from a conductive material (e.g., metal or anotherconductive material). Thus, distance D2′ can be measured between twonearest edges of the materials that form two adjacent select lines amongselect lines 281 _(A0), 283 _(A0), and 285 _(A0). For example, distanceD2′ can be measured between the nearest edges of the materials that formselect lines 281 _(A0) and 283 _(A0), or the nearest edges of thematerials that form select lines 283 _(A0) and 285 _(A0).

FIG. 6 also shows distance D1′ and D1″ between elements in memory device200. Distance D1′ is a vertical distance (e.g., vertical spacing)between the select line (e.g., 286 _(A0) among select lines 282 _(A0),284 _(A0), and 286 _(A0) in this example) that is nearest to controllines 220 ₀, 221 ₀, 222 ₀, and 223 ₀, and the control line (e.g., 223 ₀)that is nearest to select lines 282 _(A0), 284 _(A0), and 286 _(A0)(nearest to select line 286 _(A0) in this example). Thus, distance D1′can be measured between two nearest edges of the materials that formselect line 286 _(A0) and control line 223 ₀. Distance D1″ is a verticaldistance (e.g., vertical spacing) between the select line (e.g., 285_(A0) among select lines 281 _(A0), 283 _(A0), and 285 _(A0) in thisexample) that is nearest to control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀and the control line (e.g., 220 ₀) that is nearest to select lines 281_(A0), 283 _(A0), and 285 _(A0) (nearest to select line 285 _(A0) inthis example). Thus, distance D1″ can be measured between two nearestedges of the materials that form select line 285 _(A0) and control line220 ₀.

As shown in FIG. 6 , each of control lines 220 ₀, 221 ₀, 222 ₀, and 223₀ has a thickness T1 in the z-dimension. Thickness T1 is a verticalthickness of the material of a respective control line among controllines 220 ₀, 221 ₀, 222 ₀, and 223 ₀. Each of select lines 282 _(A0),284 _(A0), and 286 _(A0) has a thickness T2 in the z-dimension.Thickness T2 is a vertical thickness of the material of a respectiveselect line among select lines 282 _(A0), 284 _(A0), and 286 _(A0). Eachof select lines 281 _(A0), 283 _(A0), and 285 _(A0) has a thickness T2′in the z-dimension. Thickness T2′ is a vertical thickness of thematerial of a respective select line among select lines 281 _(A0), 283_(A0), and 285 _(A0). Thicknesses T1, T2, and T2′ can be the same (e.g.,substantially equal). Alternatively, thicknesses T2 and T2′ can be thesame (e.g., substantially equal) and each of thicknesses T2 and T2′ canbe less than thickness T1.

As shown in FIG. 6 , memory device 200 can include a dielectric (e.g.,an oxide of silicon) 655 located between elements of memory device 200.For example, dielectric 655 can be located (e.g., occupy the space)between two adjacent control lines among control lines 220 ₀, 221 ₀, 222₀, and 223 ₀. Thus, distance D1 can be the thickness of the material(e.g., an oxide of silicon) of a respective dielectric (e.g., dielectric655) between two adjacent control lines among control lines 220 ₀, 221₀, 222 ₀, and 223 ₀.

Dielectric 655 can also be located (e.g., occupy the space) between twoadjacent select lines among select lines 282 _(A0), 284 _(A0), and 286_(A0). Thus, distance D2 can be the thickness of the material (e.g., anoxide of silicon) of a respective dielectric (e.g., dielectric 655)between two adjacent select lines among select lines 282 _(A0), 284_(A0), and 286 _(A0).

Dielectric 655 can also be located (e.g., occupy the space) between twoadjacent select lines among select lines 281 _(A0), 283 _(A0), and 285_(A0). Thus, distance D2′ can be the thickness of the material (e.g., anoxide of silicon) of a respective dielectric (e.g., dielectric 655)between two adjacent select lines among select lines 281 _(A0), 283_(A0), and 285 _(A0).

FIG. 6 shows pitches P1, P2, and P2′ in the elements of memory device200. Pitch P1 is a measurement (e.g., in nanometers) of a verticalspacing of a combination of thicknesses T1 of control lines 220 ₀, 221₀, and 222 ₀, distance D1 between control lines 220 ₀ and 221 ₀, anddistance D1 between control lines 221 ₀ and 222 ₀. Pitch P2 is ameasurement (e.g., in nanometers) of a vertical spacing of a combinationof thicknesses T2 of select lines 282 _(A0), 284 _(A0), and 286 _(A0),distance D2 between select lines 282 _(A0) and 284 _(A0), and distanceD2 between select lines 284 _(A0) and 286 _(A0). Pitch P2′ is ameasurement (e.g., in nanometers) of a vertical spacing of a combinationof thicknesses T2′ of select lines 281 _(A0), 283 _(A0), and 285 _(A0),distance D2′ between select lines 281 _(A0) and 283 _(A0), and distanceD2′ between select lines 283 _(A0) and 285 _(A0).

As shown in in FIG. 6 , pitches P2 and P2′ can be the same (e.g.,substantially equal). Each of pitches P2 and P2′ can be less than pitchP1. Differences in pitches P1 and each of pitches P2 and P2′ may allowmemory device 200 to have improvements over some conventional memorydevices.

For example, in some conventional memory devices (e.g., 3-D NAND flashmemory devices), the pitch of the select lines is the same as the pitchof the control lines. This may make it difficult for the select gatesassociated with the select lines to generate GIDL current for eraseoperations in the conventional memory devices due to processfluctuation. Such process fluctuation may cause over-etching at thebottom of the pillars and may cause difficulty in control of impurityconcentration. The process fluctuation may also cause the desired pointof the electric field for the GIDL generation to be out of alignment.Thus, in some conventional memory devices, the intensity of the GIDLcurrent during an erase operation can have a wide distribution, whichmay degrade device performance.

In memory device 200, by providing multiple select lines (e.g., multipledrain select lines and multiple source select lines) and by making thepitch (e.g., pitch P2 and pitch P2′ in FIG. 6 ) of the select lines lessthan (e.g., tighter than) the pitch (e.g., pitch P1 in FIG. 6 ) of thecontrol lines, a stable GIDL generation may be obtained. This may allowmemory device 200 to have an improvement (e.g., improvement in deviceperformance) over some conventional memory devices. Further, making thepitch of the select lines less than the pitch of the control lines mayallow for a more robust process during fabrication of memory device 200that may avoid or reduce over-etching of the bottom of the pillars andmay enhance impurity concentration control. Moreover, the tighter pitchof the select lines (e.g., P2<P1 and P2′<P1 in FIG. 6 ) may allow thedrain select gates to be coupled to each other (e.g., through connection580 in FIG. 5 ) and the source select gates to be coupled to each other(e.g., through connection 581 in FIG. 5 ). This may further improve(e.g., simplify) control of signals provided to source and drain selectlines of memory device 200. In addition, making the thickness (e.g., T2or T2′ in FIG. 6 ) of the source and drain select lines the same as thethickness (e.g., T1 in FIG. 6 ) of the control lines may also simplifythe processes of making the source and drain select lines of memorydevice 200.

FIG. 7A shows a block diagram of a portion of a memory device 700, whichcan be a variation of memory device 200 of FIG. 5 , according to someembodiments described herein. Memory device 700 includes elementssimilar to or identical to those of memory device 200 of FIG. 5 . Forsimplicity, the description of similar or identical elements (which havethe same labels in FIG. 5 and FIG. 7A) between memory devices 200 and700 is not repeated in the description of FIG. 7A.

As shown in FIG. 7A, besides including elements that are similar to (orthe same as) the elements of memory device 200 (FIG. 5 ), memory device700 can include a select line 788 _(A0) (an additional drain selectline) and select gates 768 (additional select gates). Select gates 768can be controlled (e.g., turned on or turned off) by select line 788_(A0). Memory device 700 can also include a driver circuit 763 that caninclude a drive transistor (e.g., high voltage transistor) Tr3 that canbe controlled (e.g., turned on or turned off) by a signal DR3. Drivetransistor Tr3 can operate to couple select line 788 _(A0) to a signalline that has a signal (voltage signal) V3. Signal V3 can be providedwith a voltage that has a value to activate (e.g., turn on) ordeactivate (e.g., turn off) select gates 768, depending on whether ornot memory cell strings 231 a, 232 a, and 233 a are selected to beaccessed during an operation (e.g., a read or write operation) of memorydevice 700.

Select gates 768 and select gates 262, 266, and 264 can operate to servedifferent functions in different operations. As described above withreference to FIG. 4 , select gates 261 through 266 (FIG. 4 ) can operateto serve as string selectors (e.g., as switches) during a read or writeoperation (to select respective memory cell strings during the read orwrite operation), and operate to serve as GIDL generators (to generateGIDL current) during an erase operation. Thus, in memory device 200 ofFIG. 4 , the same select gates (e.g., 261 through 266) can operate toserve different functions (e.g., string selection and GIDL generationfunctions) in different operations.

However, in memory device 700 of FIG. 7A, memory cell string selectionand GIDL generation functions can be performed by different selectgates. During a read or write operation, select gates 262, 266, and 264of select circuits 241 a, 242 a, and 243 a can be activated (e.g.,turned on) to serve as pass transistors. As an example, the value of thevoltage provided to signal V1′ during a read or write operation can beapproximately 3V to 5V (or other values), such that the value of thevoltage applied to select lines 282 _(A0), 284 _(A0), and 286 _(A0)(through drive transistor Tr1 and connection 580) can also beapproximately 3V to 5V in order to activate select gates 262, 266, and264. During a read or write operation, select gates 768 can be activated(e.g., turned on) and operate (as switches) to serve as string selectorsif memory cell strings 231 a, 232 a, and 233 a are selected to beaccessed. Select gates 768 can be activated by turning on drivetransistor Tr3 in order to apply signal V3 (e.g., V3=1V to 3V in a reador write operation) to select line 788 _(A0) (which controls selectgates 768). The value of the voltage provided to signal V3 during a reador write operation can be the same as the value of the supply voltage(e.g., Vcc, not shown in FIG. 7A) of memory device 700.

In an erase operation, select gates 262, 266, and 264 of select circuits241 a, 242 a, and 243 a can be placed in a condition such that selectgates 262, 266, and 264 can operate as GIDL generators to generate GIDLcurrent for the erase operation. For example, during an erase operation,drive transistor Tr1 can be turned on to apply signal V1′ to selectlines 282 _(A0), 284 _(A0), and 286 _(A0). The value of the voltageprovided to signal V1′ during an erase operation can be close to thevalue of the voltage (e.g., V_(ERASE), not shown in FIG. 7A) applied todata lines 270, 271, and 272 (e.g., V_(ERASE)=20V and V1′=15V to 17V)during the erase operation. The value of the voltage V_(ERASE) can bemuch greater than the value of the supply voltage (e.g., Vcc=1V to 3V)of memory device 700. In an erase operation, select gates 768 can beplaced in a “float” condition, such that they may not operate as GIDLgenerators (may not generate GIDL current for the erase operation). Inan erase operation, select line 788 _(A0) can be placed in a “float”state to cause select gates 768 to be placed in the float condition. Inthe float state, select line 788 _(A0) can be decoupled from the signalline that provides signal V3 (e.g., drive transistor Tr3 can be turnedoff).

FIG. 7B shows a side view of a structure of a portion of memory device700, according to some embodiments described herein. The structure ofmemory device 700 in FIG. 7B can be a variation of the structure ofmemory device 200 of FIG. 6 . For simplicity, the description of similaror identical elements (which have the same labels in FIG. 6 and FIG. 7B)between memory devices 200 and 700 is not repeated in the description ofFIG. 7B. Differences between memory device 700 of FIG. 7B and memorydevice 200 (FIG. 6 ) include, as shown in FIG. 7B, select line 788_(A0).

As shown in FIG. 7B, select line 788 _(A0) is adjacent (locatedimmediately next to) control line 223 ₀ and vertically separated fromcontrol line 223 ₀ by a distance (e.g., spacing) D1′ (which can be thesame as distance D1′ of FIG. 6 ). Select line 788 _(A0) is adjacent(located immediately next to) select line 286 _(A0) and verticallyseparated from select line 286 _(A0) by a distance (e.g., spacing) D3.Distance D3 is a vertical distance (e.g., vertical spacing) measuredbetween two nearest edges of the materials that form select line 286_(A0) and select line 788 _(A0). Distances D1′ and D3 can be the same(e.g., substantially equal). Distances D1 and D3 can be the same. Selectline 788 _(A0) has a thickness T3 that can be the same as (e.g.,substantially equal to) thickness T1. Each of select gates 768 can havethe same structure (e.g., TANOS structure) as memory cells 210, 211,212, and 213. Memory device 700 (FIG. 7A and FIG. 7B) can includeimprovements at least similar to those of memory device 200.

FIG. 8A shows a block diagram of a portion of a memory device 800, whichcan be a variation of memory device 200 of FIG. 5 , according to someembodiments described herein. Memory device 800 includes elementssimilar to or identical to those of memory device 200 of FIG. 5 . Forsimplicity, the description of similar or identical elements (which havethe same labels in FIG. 5 and FIG. 8A) between memory devices 200 and800 is not repeated in the description of FIG. 8A.

As shown in FIG. 8A, besides including elements that are similar to (orthe same as) the elements of memory device 200 (FIG. 5 ), memory device800 can include an additional select line (additional source selectline) 887 _(A0) and select gates 867. Memory device 800 can also includea driver circuit 864 that can include a drive transistor (e.g., highvoltage transistor) Tr4 that can be controlled (e.g., turned on orturned off) by a signal DR4. Drive transistor Tr4 can operate to coupleselect line 887 _(A0) to a signal line that has a signal (voltagesignal) V4. Signal V4 can be provided with a voltage that has a value toactivate (e.g., turn on) or deactivate (e.g., turn off) select gates867, depending on whether or not memory cell strings 231 a, 232 a, and233 a are selected to be accessed during an operation (e.g., a read orwrite operation) of memory device 800.

The operations and functions of select gates 261, 263, and 265 can besimilar to those of select gates 262, 264, and 266 of FIG. 7A. Forexample, select gates 261, 263, and 265 of FIG. 8A can operate to serveas pass transistors during a read or write operation of memory device800 and operate to serve as GIDL generators to generate GIDL currentduring an erase operation of memory device 800. Signal V2′ can beprovided with voltages having values similar to those of signal V1′ ofFIG. 7A. For example, during a read or write operation, the value of thevoltage provided to signal V2′ in FIG. 8A can be approximately 3V to 5V(or other values). During an erase operation, signal V2′ can be providedwith a voltage (e.g., 15 V to 17 V) close to the value of an erasevoltage (e.g., V_(ERASE)=20 V, not shown in FIG. 8A) applied to line 299during the erase operation.

The operations and functions of select gates 867 of FIG. 8A can besimilar to those of select gates 768 of FIG. 7A. For example, selectgates 867 of FIG. 8A can operate (e.g., as switches) to serve as memorycell string selectors during a read or write operation of memory device800. Select gates 867 can be placed in a float condition (e.g., not toserve as GIDL generators) during an erase operation of memory device800. During a read or write operation, signal V4 can be provided withvoltages having values similar to those of signal V3 of FIG. 7A. In anerase operation, select line 887 _(A0) can be placed in a “float” stateto cause select gates 867 to be placed in the float condition. In thefloat state, select line 887 _(A0) can be decoupled from the line thatprovides signal V4 (e.g., Tr4 can be turned off).

FIG. 8B shows a side view of a structure of a portion of memory device800, according to some embodiments described herein. The structure ofmemory device 800 in FIG. 8B can be a variation of the structure ofmemory device 200 of FIG. 6 . For simplicity, the description of similaror identical elements (which have the same labels in FIG. 6 and FIG. 8B)between memory devices 200 and 800 is not repeated in the description ofFIG. 8B. Differences between memory device 800 of FIG. 8B and memorydevice 200 (FIG. 6 ) include, as shown in FIG. 8B, select line 887_(A0).

As shown in FIG. 8B, select line 887 _(A0) is adjacent (locatedimmediately next to) control line 220 ₀ and vertically separated fromcontrol line 220 ₀ by a distance (e.g., spacing) D1″ (which can be thesame as distance D1″ of FIG. 6 ). Select line 887 _(A0) is adjacent(located immediately next to) select line 285 _(A0) and verticallyseparated from select line 285 _(A0) by a distance (e.g., spacing) D4.Distance D4 is a vertical distance (e.g., vertical spacing) measuredbetween two nearest edges of the materials that form select line 285_(A0) and select line 887 _(A0). Distances D1″ and D4 can be the same(e.g., substantially equal). Distances D1 and D4 can be the same (e.g.,substantially equal). Select line 887 _(A0) has a thickness T4 that canbe the same as (e.g., substantially equal to) thickness T1. Each ofselect gates 867 can have the same structure (e.g., TANOS structure) asmemory cells 210, 211, 212, and 213. Memory device 800 (FIG. 8A and FIG.8B) can include improvements at least similar to those of memory device200.

FIG. 9A shows a block diagram of a portion of a memory device 900, whichcan be a variation of memory device 500 of FIG. 5 . Memory device 900includes elements and performs operations similar to or identical tothose of memory device 200 of FIG. 5 , memory device 700 of FIG. 7A, andmemory device 800 of FIG. 8A. For example, as shown in FIG. 9A, memorydevice 900 can include a combination of a portion of memory device 700(FIG. 7A) and a portion of memory device 800 (FIG. 8A). For simplicity,the description of similar or identical elements (which have the samelabels in FIG. 5 , FIG. 7A, FIG. 8A, and FIG. 9A) among memory device200 (FIG. 5 ), memory device 700 (FIG. 7A), memory device 800 (FIG. 8A),and memory device 900 are not repeated in the description of FIG. 9A.

FIG. 9B shows a side view of a structure of a portion of memory device900, according to some embodiments described herein. The structure ofmemory device 900 in FIG. 9B can be a combination of a portion of thestructure of memory device 700 (FIG. 7B) and a portion of the structureof memory device 800 (FIG. 8B). For simplicity, the description ofsimilar or identical elements (which have the same labels in FIG. 6 ,FIG. 7B, FIG. 8B, and FIG. 9B) among memory device 200 (FIG. 6 ), memorydevice 700 (FIG. 7B), memory device 800 (FIG. 8B), and memory device 900is not repeated in the description of FIG. 9B. Memory device 900 (FIG.9A and FIG. 9B) can include improvements at least similar to those ofmemory device 200.

FIG. 10 shows a top view of a structure of a portion of a memory device1000, according to some embodiments described herein. Memory device 1000can include elements similar to or identical to those of memory device200 described above with reference to FIG. 2 through FIG. 6 . Forsimplicity, the description of similar or identical elements (which havethe same labels in FIG. 6 and FIG. 10 ) between memory devices 200 and1000 is not repeated in the description of FIG. 10 .

As shown in FIG. 10 , memory device 1000 can include slits (e.g., gaps)1001, 1002, and 1003 between sub-block 290 ₁ and 290 ₂. Slits 1001,1002, and 1003 can include dielectric material (e.g., an oxide ofsilicon) located (filled) in each of slits 1001, 1002, and 1003. Slits1001, 1002, and 1003 are cuts in the materials (e.g., layers) of memorydevice 1000 and are formed during processes (e.g., a damascene process)of forming memory device 1000. As shown in FIG. 10 , two of slits 1001,1002, and 1003 can be located immediately on opposing sides (e.g., leftand right sides) of the control lines (e.g., 220 ₀, 221 ₀, 222 ₀, and223 ₀) of a sub-block (e.g., sub-block 290 ₁).

As shown in a cut-away view in FIG. 10 , select line 286 _(A0) isunderneath select line 284 _(A0), and select line 284 _(A0) isunderneath select line 282 _(A0). Each of select lines (e.g., drainselect lines) 282 _(A0), 284 _(A0), and 286 _(A0) has a length extendingin the direction of the y-dimension and a width extending in thedirection of the x-dimension. Other drain select lines (e.g., 282 _(A1),284 _(A1), 286 _(A1), 282 _(B0), 284 _(B0), 286 _(B0), 282 _(B1), 284_(B1), and 286 _(B1)) have similar arrangements to select lines 282_(A0), 284 _(A0), and 286 _(A0).

As shown in FIG. 10 , control line 220 ₀ is underneath control line 221₀, which is underneath control line 222 ₀, which is underneath controlline 223 ₀. Similarly, control line 220 ₁ is underneath control line 221₁, which is underneath control line 222 ₁, which is underneath controlline 223 ₁. Each of control lines 220 ₀, 221 ₀, 222 ₀, 223 ₀, 220 ₁, 221₁, 222 ₁, and 223 ₁ has a length extending in the direction of they-dimension, and a width extending in the direction of the x-dimension.The width of a particular control line (e.g., 223 ₀) is the dimension ofthat particular control line measured from one slit (e.g., 1001) toanother slit (e.g., 1002). Each of control lines 220 ₀, 221 ₀, 222 ₀,and 223 ₀ can be coupled to a respective one of control lines 220 ₁, 221₁, 222 ₁, and 223 ₁ by a respective connection among connections 1029 ₀,1029 ₁, 1029 ₂, and 1029 ₃. As shown in FIG. 10 , the width of each ofselect lines 282 _(A0), 284 _(A0), and 286 _(A0) can be less than thewidth of each of control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀.

FIG. 10 also shows data lines 270, 271, and 272, pillars 631, 632, and633 (which are also shown in FIG. 6 ), and other pillars 1030. Each ofdata lines 270, 271, and 272 has a length extending in the direction ofthe x-dimension. Portion 643 of each of pillars 631, 632, 633, and 1030is coupled to a respective data line among data lines 270, 271, and 272.For example, portion 643 of each of pillars 631, 632, 633 and 1030 candirectly contact a conductive material region of a respective data lineamong data lines 270, 271, and 272.

As shown in FIG. 10 , select lines (e.g., source select lines) 281 _(A0)and 281 _(A1) (labeled as 281 _(A0/A1)) can be the same select line(e.g., can be formed from the same piece of conductive material).Similarly, select lines 283 _(A0) and 283 _(A1) (labeled as 283_(A0/A1)) can be the same select line; select lines 285 _(A0) and 285_(A1) (labeled as 285 _(A0/A1)) can be the same select line; selectlines 281 _(B0) and 281 _(B1) (labeled as 281 _(B0/B1)) can be the sameselect line; select lines 283 _(B0) and 283 _(B1) (labeled as 283_(B0/B1)) can be the same select line; and select lines 285 _(B0) and285 _(B1) (labeled as 285 _(B0/B1)) can be the same select line.

Each of the source select lines (e.g., 281 _(A0/A1)) of memory device1000 can have a length extending in the direction of the y-dimension,and a width extending in the direction of the x-dimension. The width ofthe source select lines can be the same as (e.g., substantially equalto) the width of control lines 220 ₀, 221 ₀, 222 ₀, 223 ₀, 220 ₁, 221 ₁,222 ₁, and 223 ₁ of memory device 1000.

FIG. 11 shows a top view of a structure of a portion of a memory device1100, according to some embodiments described herein. Memory device 1100can a block (block of memory cells) 1190 having sub-blocks 1190 _(j),1190 _(j+1), and 1190 _(j+2). FIG. 11 shows an example where block 1190includes three sub-blocks. However, block 1190 can include more thanthree sub-blocks. For example, block 1190 can include a sub-block (orsub-blocks) on the left of sub-block 1190 _(j) and a sub-block (orsub-blocks) on the right of sub-block 1190 _(j+2).

As shown in FIG. 11 , memory device 1100 can include slits (e.g., gaps)1101, 1102, 1103, and 1104 between the sub-blocks of block 1190, such asslit 1102 between sub-blocks 1190 _(j) and 1190 _(j+1), and slit 1103between sub-blocks 1190 _(j+1) and 1190 _(j+2). Slits 1101, 1102, 1103,and 1104 are cuts in the materials (e.g., layers) of memory device 1100and are formed during processes (e.g., a damascene process) of formingmemory device 1100. As shown in FIG. 11 , two of slits 1101, 1102, 1103,and 1104 (e.g., 1102 and 1103) can be located immediately on opposingsides (e.g., left and right sides) of a sub-block of memory device 1100.

Memory device 1100 can include data lines 1170 _(i), 1170 _(i+1), 1170_(i+2), and 1170 _(i+3) (collectively called data lines 1170_((i, i+1, i+2, i+3)) for simplicity). Data lines 1170_((i, i+1, i+2, i+3)) and associated signals BL_(i), BL_(i+1), BL_(i+2),and BL_(i+3) can be similar to the data lines (e.g., data lines 270,271, and 272) and their associated signals (e.g., BL0, BL1, and BL2) ofmemory device 200 (FIG. 2 through FIG. 6 ). As shown in FIG. 11, each ofdata lines 1170 _((i, i+1, i+2, i+3)) has a length extending in thedirection of the y-dimension and is located over other elements ofmemory device 1100.

Memory device 1100 can include pillars 1130, which can includerespective portions (e.g., conductive materials) 1143. Pillars 1130 cancorrespond to the pillars (e.g., 631, 632, and 633) of memory device 600of FIG. 6 , such that each of pillars 1130 of FIG. 11 can have a lengthextending in the a direction of the z-dimension (which is perpendicularto the x-dimension and the y-dimension), and such that portions 1143 ofpillars 1130 of FIG. 11 can correspond to portions 643 of the pillars ofFIG. 6 . As shown in FIG. 11 , each of pillars 1130 can be locatedunderneath and coupled to a respective data line among data lines 1170_(i, i+1, i+2, i+3)). For example, portion 1143 of each of pillars 1130can directly contact a conductive material region of a respective dataline among data lines 1170 _((i, i+1, i+2, i+3)).

Memory device 1100 can include control lines 1120 _(j), 1121 _(j), 1122_(j), 1123 _(j), 1120 _(j+1), 1121 _(j+1), 1122 _(j+1), 1123 _(j+1),1120 _(j+2), 1121 _(j+2), 1122 _(j+2), and 1123 _(j+2), (collectivelycalled control lines 1120/1121/1122/1123 _((j, j+1, j+2)) forsimplicity). Control lines 1120/1121/1122/1123 _((j, j+1, j+2)) andassociated signals WL0 ₀, WL1 ₀, WL2 ₀, and WL3 ₀ can be similar tocontrol lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀ and their associatedsignals (WL0 ₀, WL1 ₀, WL2 ₀, and WL3 ₀) of memory device 200 of FIG. 6. Thus, control lines 1120/1121/1122/1123 _((j, j+1, j+2)) can beseparated from one another by a distance (with respect to thez-dimension) that is similar to or identical to distance D1 of FIG. 6 .Each of control lines 1120/1121/1122/1123 _((j, j+1, j+2)) can have athickness (with respect to the z-dimension) that is similar to oridentical to thickness T1 of FIG. 6 . As shown in FIG. 11 , controllines 1120/1121/1122/1123 _((j, j+1, j+2)) can be coupled to each otherthrough connections 1129 ₀, 1129 ₁, 1129 ₂, and 1129 ₃.

Memory device 1100 can include select lines (e.g., drain select lines)1182 _(j), 1184 _(j), 1186 _(j), 1182 _(j+1), 1184 _(j+1), 1186 _(j+1),1182 _(j+2), 1184 _(j+2), and 1186 _(j+2), (collectively called selectlines 1182/1184/1186 _((j, j+1, j+2)) for simplicity). Select lines1182/1184/1186 _((j, j+1, j+2)) (shown in a cut-away view) are locatedover the control lines of memory device 1100. Select lines1182/1184/1186 _((j, j+1, j+2)) and associated signals SGD1 _(j), SGD2_(j), and SGD3 _(j); or SGD1 _(j+1), SGD2 _(j+1), SGD3 _(j+1); or SGD1_(j+2), SGD2 _(j+2), and SGD3 _(j+2) can be similar to drain selectlines 282 _(A0), 284 _(A0), and 286 _(A0) in FIG. 6 (and theirassociated signals SGD3 _(A0), SGD2 _(A0), and SGD1 _(A0) in FIG. 4 ) ofmemory device 200 of FIG. 6 . Thus, select lines 1182/1184/1186_((j, j+1, j+2)) can be separated from one another by a distance (withrespect to the z-dimension) that is similar to or identical to distanceD2 of FIG. 6 . Each of select lines 1182/1184/1186 _((j, j+1, j+2)) canhave a thickness (with respect to the z-dimension) that is similar to oridentical to thickness T2 of FIG. 6 .

Memory device 1100 can include select lines (e.g., source select lines)1181 _(j), 1183 _(j), 1185 _(j), 1181 _(j+1), 1183 _(j+1), 1185 _(j+1),1181 _(j+2), 1183 _(j+2), and 1185 _(j+2), (collectively called selectlines 1181/1183/1185 _((j, j+1, j+2)) for simplicity). Select lines1181/1183/1185 _((j, j+1, j+2)) (shown in a cut-away view) areillustrated in dashed lines to indicate that they are located underneathcontrol lines 1120/1121/1122/1123 _((j, j+1, j+2)). Select lines1181/1183/1185 _((j, j+1, j+2)) and associated signals SGS1 _(j), SGS2_(j), and SGS3 _(j); or SGS1 _(j+1), SGS2 _(j+1), SGS3 _(j+1); or SGS1_(j+2), SGS2 _(j+2), and SGS3 _(j+2) can be similar to drain selectlines 281 _(A0), 283 _(A0), and 285 _(A0) in FIG. 6 (and theirassociated signals SGS3 _(A0), SGS2 _(A0), and SGS1 _(A0) in FIG. 4 ) ofmemory device 200 of FIG. 6 . Thus, select lines 1181/1183/1185_((j, j+1, j+2)) can be separated from one another by a distance (withrespect to the z-dimension) that is similar to or identical to distanceD2′ of FIG. 6 . Each of select lines 1181/1183/1185 _((j, j+1, j+2)) canhave a thickness (with respect to the z-dimension) that is similar to oridentical to thickness T2′ of FIG. 6 . As shown in FIG. 11 , selectlines 1181/1183/1185 _((j, j+1, j+2)) can be coupled to each otherthrough connections 1189.

As shown in FIG. 11 , each of control lines 1120/1121/1122/1123_((j, j+1, j+2)) has a length extending in the direction of they-dimension and a width W extending in the direction of the x-dimension.Width W of a particular control line (e.g., 1123 _(j)) is the entiredimension of that particular control line (e.g., 1123 _(j)) measuredfrom one slit (e.g., 1101) to another slit (e.g., 1102).

Each of select lines 1182/1184/1186 _((j, j+1, j+2)) has a lengthextending in the direction of the y-dimension, and a width W extendingin the direction of the x-dimension. The length of select lines1182/1184/1186 _((j, j+1, j+2)) can be less than the length of controllines 1120/1121/1122/1123 _((j, j+1, j+2)). Width W of a particularselect line (e.g., drain select line 1182 _(j)) among select lines1182/1184/1186 _((j, j+1, j+2)) is the entire dimension of thatparticular select line (e.g., drain select line 1182 _(j)) measured fromone slit (e.g., 1101) to another slit (e.g., 1102).

Each of select lines 1181/1183/1185 _((j, j+1, j+2)) has a lengthextending in the direction of the y-dimension, and a width W extendingin the direction of the x-dimension. The length of select lines1181/1183/1185 _((j, j+1, j+2)) can be greater the than the length ofcontrol lines 1120/1121/1122/1123 _((j, j+1, j+2)). Width W of aparticular select line (e.g., source select line 1181 _(j)) among selectlines 1181/1183/1185 _((j, j+1, j+2)) is the entire dimension of thatparticular select line (e.g., source select line 1181 _(j)) measuredfrom one slit (e.g., 1101) to another slit (e.g., 1102).

Thus, as shown in FIG. 11 , in memory device 1100, control lines1120/1121/1122/1123 _((j, j+1, j+2)), select lines 1182/1184/1186_((j, j+1, j+2)), and select lines 1181/1183/1185 _((j, j+1, j+2)) canhave the same width W.

Further, as shown in FIG. 11 , two of slits 1101, 1102, 1103, and 1104can be located immediately next to opposing sides (e.g., left and rightsides) of the control lines, the drain select lines, and the sourceselect lines of a sub-block of memory device 1100. For example, slits1102 and 1103 (which include dielectric material filled therein) arelocated immediately next to opposing sides (e.g., left and right sides)of control lines 1120 _(j+1), 1121 _(j+1), 1122 _(j+1), 1123 _(j+1),select lines 1182 _(j+1), 1184 _(j+1), and 1186 _(j+1), and select lines1181 _(j+1), 1183 _(j+1), and 1185 _(j+1) of sub-block 1190 _(j+1).

FIG. 12 shows a top view of a structure of a portion of a memory device1200, according to some embodiments described herein. Memory device 1200can be a variation of memory device 1100. Thus, the structure of memorydevice 1200 can be similar to the structure of memory device 1100. Forsimplicity, the description of similar or identical elements (which havethe same labels in FIG. 11 and FIG. 12 ) between memory devices 1100 and1200 is not repeated in the description of FIG. 12 . Differences betweenmemory devices 1100 and 1200 include, as shown in FIG. 12 , thearrangement of data lines 1170 _((i, i+1, i+2, i+3)) and pillars 1130,and connections between data lines 1170 _((i, i+1, i+2, i+3)) andpillars 1130.

As shown in FIG. 12 , memory device 1200 can include conductive bridges1270. Conductive bridges 1270 can be coupled to data lines 1170_((i, i+1, i+2, i+3)) through conductive contacts (e.g., conductiveplugs) 1275. Conductive bridges 1270 can be coupled to pillars 1130through portions 1143. Conductive contacts 1275 can be located at slits1101, 1102, 1103, and 1104. Each of conductive bridges 1270 can includea piece of conductive material having a length extending in thedirection of the x-dimension. Conductive bridges 1270 can be located ona level of memory device 1200 that is above pillars 1130 and below datalines 1170 _((i, i+1, i+2, i+3)).

FIG. 13 through FIG. 15 show processes of forming a memory device 1300,according to some embodiments described herein. The processes describedwith reference to FIG. 13 through FIG. 15 can be used to form memorydevices (and their variations) described above with reference to FIG. 1through FIG. 12 . Some of the processes of forming memory device 1300and some of the elements of memory device 1300 may be readily known tothose skilled in the art. Thus, to help focus on the embodimentsdescribed herein, some of the processes of forming memory device 1300shown FIG. 13 through FIG. 15 and additional processes to completememory device 1300 are omitted. Further, for simplicity, similar oridentical elements among the memory devices in FIG. 2 through FIG. 15are given the same labels.

FIG. 13 shows memory device 1300 after materials 655′ and 1302 areformed over line (e.g., source) 299 and substrate 690. Forming materials655′ and 1302 can include depositing alternating dielectric materials(e.g., alternating layers of materials 655′ and layers of materials1302) over line 299 and substrate 690. Materials 655′ can include anoxide of silicon (e.g., silicon dioxide SiO₂). Materials 1302 caninclude a combination of silicon and nitrogen (e.g., silicon nitriteSiNO₄). Materials 1302 can be formed in each of levels 607 through 616of memory device 1300 (e.g., each layer of materials 1302 can be formedin a respective level among levels 607 through 616).

As shown in FIG. 13 , at each of levels 607 through 616, materials 1302can be formed to have the thicknesses T1, T2, and T2′ that can be thesame thickness (e.g., T1=T2=T2′). Some of materials 655′ (e.g., somelayers of materials 655′) can be formed to have different thicknesses,such as thicknesses T_(D1), T_(D1), T_(D1″), T_(D2), and T_(D2′).Thicknesses T_(D2) and T_(D2′) can be the same (e.g., substantiallyequal). Each of thicknesses T_(D2) and T_(D2′) can be less thanthickness T_(D1).

FIG. 14 shows memory device 1300 after some elements of memory device1300 are formed. Such memory elements include a portion of each ofpillars 631, 632, and 633, memory cell strings 231 a, 232 a, and 233 a,control lines 220 ₀, 221 ₀, 222 ₀, and 223 ₀, select lines 282 _(A0),284 _(A0), and 286 _(A0), select lines 281 _(A0), 283 _(A0), and 285_(A0), and other elements (as shown in FIG. 14 ) that can be similar tothose of memory device 600 of FIG. 6 .

Forming the elements of memory device 1300 in FIG. 14 can include usinga process such as a damascene process or other processes. For example,after the materials 655′ and 1302 (FIG. 13 ) are formed, holes (verticalholes, not shown) can be formed in materials 655′ and 1302 at thelocations of pillars 631, 632, and 633. The holes can be formed byremoving parts of materials 655′ and 1302 (at the locations of theholes) and leaving a remaining part of materials 655′ (which are thematerials of dielectrics 655 in FIG. 14 where the holes were not formed)and leaving a remaining part of materials 1302 (where the holes were notformed). The bottoms of the holes can be at line 299. After the holesare formed, memory cell strings 231 a, 232 a, and 233 a (includingstructures 630) can be formed at the locations of the holes. Otherstructures (e.g., portions 644, 645, 646, and parts of portions 643) ofmemory device 1300 can also be formed at the locations of the holes.

After the portions of pillars 631, 632, and 633 are formed, theremaining part of materials 1302 (where the holes were not formed) canbe removed (e.g., by etching). Removing materials 1302 can includeforming slits (e.g., slits 1101, 1102, 1103, and 1104 in FIG. 11 andFIG. 12 ) in the remaining part of materials 655′ and in the remainingpart of materials 1302. Then, material 1302 can be subsequently etchedaway through the slits, thereby leaving vacancies at the locations oneach of levels 607 through 616 where materials 1302 were (before theirremoval).

After the removal of materials 1302, conductive material (e.g., metalsuch as tungsten or other conductive materials) may be formed (e.g.,filled) in the vacancies (e.g., vacancies on each of levels 607 to 616in FIG. 14 ) where materials 1302 were removed. The conductive materialon each of levels 607 to 616 in FIG. 14 forms the respective selectlines 281 _(A0), 283 _(A0), and 285 _(A0), control lines 220 ₀, 221 ₀,222 ₀, and 223 ₀, and select lines 286 _(A0), 284 _(A0), and 282 _(A0)of memory device 1300 as shown in FIG. 14 .

Thus, as described above, select lines 281 _(A0), 282 _(A0), 283 _(A0),284 _(A0), 285 _(A0), and 286 _(A0) and control lines 220 ₀, 221 ₀, 222₀, and 223 ₀ can be formed concurrently (formed by the same process step(or steps)). Further, select lines 281 _(A0), 282 _(A0), 283 _(A0), 284_(A0), 285 _(A0), and 286 _(A0) and control lines 220 ₀, 221 ₀, 222 ₀,and 223 ₀ can also be formed from the same conductive material (e.g.,metal or other conductive materials).

FIG. 15 shows memory device 1300 after other elements of memory device1300 are formed. Such elements include additional conductive materialsat portions 643 to complete pillars 631, 632, and 633, and otherportions of memory device 1300. As shown in FIG. 15 , memory device 1300can include elements that are similar to or identical to the elements ofmemory device 200 of FIG. 6 .

The illustrations of apparatuses (e.g., memory devices 100, 200, 700,800, 900, 1000, 1100, 1200, and 1300) and methods (e.g., operatingmethods associated with memory devices 100, 200, 700, 800, 900, 1000,1100, 1200, and 1300, and methods (e.g., processes) of forming thesememory devices) are intended to provide a general understanding of thestructure of various embodiments and are not intended to provide acomplete description of all the elements and features of apparatusesthat might make use of the structures described herein. An apparatusherein refers to, for example, either a device (e.g., any of memorydevices 100, 200, 700, 800, 900, 1000, 1100, 1200, and 1300) or a system(e.g., a computer, a cellular phone, or other electronic systems) thatincludes a device such as any of memory devices 100, 200, 700, 800, 900,1000, 1100, 1200, and 1300.

Any of the components described above with reference to FIG. 1 throughFIG. 15 can be implemented in a number of ways, including simulation viasoftware. Thus, apparatuses (e.g., memory devices 100, 200, 700, 800,900, 1000, 1100, 1200, and 1300 or part of each of these memory devices,including a control unit in these memory devices, such as control unit118 (FIG. 1 )) described above may all be characterized as “modules” (or“module”) herein. Such modules may include hardware circuitry, single-and/or multi-processor circuits, memory circuits, software programmodules and objects and/or firmware, and combinations thereof, asdesired and/or as appropriate for particular implementations of variousembodiments. For example, such modules may be included in a systemoperation simulation package, such as a software electrical signalsimulation package, a power usage and ranges simulation package, acapacitance-inductance simulation package, a power/heat dissipationsimulation package, a signal transmission-reception simulation package,and/or a combination of software and hardware used to operate orsimulate the operation of various potential embodiments.

Memory devices 100, 200, 700, 800, 900, 1000, 1100, 1200, and 1300 maybe included in apparatuses (e.g., electronic circuitry) such ashigh-speed computers, communication and signal processing circuitry,single- or multi-processor modules, single or multiple embeddedprocessors, multicore processors, message information switches, andapplication-specific modules including multilayer, multichip modules.Such apparatuses may further be included as subcomponents within avariety of other apparatuses (e.g., electronic systems), such astelevisions, cellular telephones, personal computers (e.g., laptopcomputers, desktop computers, handheld computers, tablet computers,etc.), workstations, radios, video players, audio players (e.g., MP3(Motion Picture Experts Group, Audio Layer 3) players), vehicles,medical devices (e.g., heart monitor, blood pressure monitor, etc.), settop boxes, and others.

The embodiments described above with reference to FIG. 1 through FIG. 15include apparatuses, and methods of forming and operating theapparatuses. Some of the apparatuses include a pillar including alength, a memory cell string and control lines located along a firstsegment of the pillar, and select lines located along a second segmentof the pillar. The control lines include at least a first control lineand a second control line. The first control line is adjacent the secondcontrol line. The first control line is separated from the secondcontrol line by a first distance in a direction of the length of thepillar. The select lines include at least a first select line and asecond select line. The first select line is separated from the secondselect line by a second distance in the direction of the length of thepillar. The second distance is less than the first distance. Otherembodiments including additional apparatuses and methods are described.

The above description and the drawings illustrate some embodiments ofthe inventive subject matter to enable those skilled in the art topractice the embodiments of the inventive subject matter. Otherembodiments may incorporate structural, logical, electrical, process,and other changes. Examples merely typify possible variations. Portionsand features of some embodiments may be included in, or substituted for,those of others. Many other embodiments will be apparent to those ofskill in the art upon reading and understanding the above description.

What is claimed is:
 1. An apparatus comprising: a first device; and asecond device to communicate with the first device, the second devicecomprising: a data line; a pillar including a first segment and a secondsegment; a memory cell string and control lines located adjacent thefirst segment of the pillar; a first dielectric material between a firstcontrol line of the control lines and a second control line of thecontrol lines; select lines located adjacent the second segment of thepillar, the select lines located between the data line and the memorycell string; and a second dielectric material between a first selectline of the select lines and a second select line of the select lines,wherein a thickness of the second dielectric material is less than athickness of the first dielectric material.
 2. The apparatus of claim 1,wherein the select lines are coupled to each other.
 3. The apparatus ofclaim 1, wherein one of the first and second devices includes a memorydevice.
 4. The apparatus of claim 1, wherein the thickness of the firstselect line is a same as the thickness of the first control line.
 5. Theapparatus of claim 1, wherein the select lines and the control lineshave a same material.
 6. The apparatus of claim 1, wherein the selectlines and the control lines include metal.
 7. The apparatus of claim 6,further comprising an additional select line different from the selectlines, the additional select line located along a segment of the pillarbetween the select lines and the memory cell string and electricallyseparated from the select lines.
 8. An apparatus comprising: a firstdevice; and a second device to communicate with the first device, thesecond device comprising: a source; a pillar including a first segmentand a second segment; a memory cell string and control lines locatedadjacent the first segment of the pillar; a first dielectric materialbetween a first control line of the control lines and a second controlline of the control lines; select lines located adjacent the secondsegment of the pillar, the select lines located between the source andthe memory cell string; and a second dielectric material between a firstselect line of the select lines and a second select line of the selectlines, wherein a thickness of the second dielectric material is lessthan a thickness of the first dielectric material.
 9. The apparatus ofclaim 8, wherein one of the first and second devices includes a memorycontroller.
 10. The apparatus of claim 8, wherein the thickness of thefirst select line is a same as the thickness of the first control line.11. The apparatus of claim 8, wherein the select lines and the controllines have a same material.
 12. The apparatus of claim 8, wherein theselect lines and the control lines include metal.
 13. The apparatus ofclaim 8, wherein the select lines are coupled to each other.
 14. Theapparatus of claim 13, further comprising an additional select linedifferent from the select lines, the additional select line locatedalong a segment of the pillar between the select lines and the memorycell string and electrically separated from the select lines.
 15. Anapparatus comprising: a first device; and a second device including amemory device to communicate with the first device, the memory deviceincluding; a data line; a source; a pillar including a first segment, asecond segment, and a third segment, the first segment located betweenthe second and third segment; a memory cell string and control lineslocated adjacent the first segment of the pillar; a first dielectricmaterial between a first control line of the control lines and a secondcontrol line of the control lines; first select lines located adjacentthe second segment of the pillar, the first select lines located betweenthe data line and the memory cell string; and a second dielectricmaterial between a first select line of the first select lines and asecond select line of the first select lines, wherein a combination of athickness of the first select line, a thickness of the second selectline, and a thickness of the second dielectric material is less than acombination of a thickness of the first control line, a thickness of thesecond control line, and a thickness of the first dielectric material;second select lines located adjacent the third segment of the pillar,the second select lines located between the source and the memory cellstring; and a third dielectric material between a first select line ofthe second select lines and a second select line of the second selectlines, wherein a combination of a thickness of the first select line ofthe second select lines, a thickness of the second select line of thesecond select lines, and a thickness of the third dielectric material isless than a combination of the thickness of the first control line, thethickness of the second control line, and the thickness of the firstdielectric material.
 16. The apparatus of claim 15, wherein the firstdevice includes a processor.
 17. The apparatus of claim 15, wherein thethickness of the third dielectric material is less than the thickness ofthe first dielectric material.
 18. The apparatus of claim 15, whereinthe thickness of the first select line of the first select lines is asame as the thickness of the first control line.
 19. The apparatus ofclaim 15, wherein the thickness of the first select line of the secondselect lines is a same as the thickness of the first control line. 20.The apparatus of claim 15, wherein the first select lines, the secondselect lines, and the control lines have a same material.